Saturday, February 3, 2007

Materials and Gas Systems in Plasma Etching

Slide 1: General Overview of materials and gas systems relevant for VLSI production

Slide 2: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiFe

Slide 3: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiMnSb

Slide 4: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: CMR materials

More plasma etch fundamentals …

2 comments:

Anonymous said...

Thank you, that was extremely valuable and interesting...I will be back again to read more on this topic.

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