The electron temperature of the plasma is generally lower than the threshold energies for dissociation of the feed gas molecules. Dissociation and ionization are induced by the high energy tail of the EEDF (slide 1). The EEDF for inductive and capacitive plasmas are different.

More plasma etch fundamentals …

## 2 comments:

can anybody please tell about x and y axis parameters, what are these ?

The x axis is the energy and the y axis is the probability that the electrons have that energy. The fact that the electron temperature Te is shown at the x axis is somewhat sloppy. It should mean kTe where k is the Boltzmann constant, i.e. 8.617343(15)×10-5 eV.

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