Showing posts with label traditional materials and etch chemistries. Show all posts
Showing posts with label traditional materials and etch chemistries. Show all posts

Saturday, February 3, 2007

Materials and Gas Systems in Plasma Etching

Slide 1: General Overview of materials and gas systems relevant for VLSI production

Slide 2: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiFe

Slide 3: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiMnSb

Slide 4: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: CMR materials

More plasma etch fundamentals …