Slide 1: General Overview of materials and gas systems relevant for VLSI production
Slide 2: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiFe
Slide 3: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiMnSb
Slide 4: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: CMR materials
More plasma etch fundamentals …