The electron temperature of the plasma is generally lower than the threshold energies for dissociation of the feed gas molecules. Dissociation and ionization are induced by the high energy tail of the EEDF (slide 1). The EEDF for inductive and capacitive plasmas are different.
More plasma etch fundamentals …
Showing posts with label electron temperature. Show all posts
Showing posts with label electron temperature. Show all posts
Saturday, February 3, 2007
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