September 5, 2006
Who really got the first EUV tool ? EE Times reported on 8/28 that ASML Holding NV has shipped the world's first extreme ultraviolet (EUV) lithography tool to the College of Nanoscale Science and Engineering (CNSE) of the University at Albany, New York. A few days later, NE Asia online wrote in an article that IMEC has started the installation of the world's first extreme ultraviolet (EUV) alpha demo on August 16 at 7am CET. The tool is also made by ASML.
Full story: http://www.clarycon.com/claryconeuvnews.html