Saturday, February 3, 2007

Non-equilibrium Plasmas

Plasmas used in plasma processing are non-equilibrium plasmas. Non-equilibrium plasmas are characterized by charged species with a much higher kinetic energy than neutral species (slide 1).

More plasma etch fundamentals …
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1 comment:

Anonymous said...

please explain the difference with equilibrium condition. which one is higher performance. Thanks

September 23, 2010 at 12:40:00 AM PDT

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